Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253947 | Device and method for measuring lithography masks | Albrecht Hof, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm +3 more | 2012-08-28 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors +3 more | 2004-06-15 |