Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253947 | Device and method for measuring lithography masks | Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Wolfgang Scherm +3 more | 2012-08-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253947 | Device and method for measuring lithography masks | Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Wolfgang Scherm +3 more | 2012-08-28 |