Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8593642 | Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device | Rolf Freimann, Bernd Doerband, Stefan Schulte, Albrecht Hof, Frank Riepenhausen +3 more | 2013-11-26 |
| 8253947 | Device and method for measuring lithography masks | Albrecht Hof, Günter Maul, Dietmar Neugebauer, Monika Frey, Wolfgang Scherm +3 more | 2012-08-28 |