Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359703 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Rolf Freimann, Jochen Hetzler | 2019-07-23 |
| 10101667 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Rolf Freimann, Jochen Hetzler | 2018-10-16 |
| 9310693 | Method for operating a projection exposure tool and control apparatus | Michael Gerhard, Toralf Gruner | 2016-04-12 |
| 9250062 | Devices for determining layer thickness and/or contamination level of a belt | Ralf Lindner | 2016-02-02 |
| 8687203 | Method and apparatus for determining a shape of an optical test surface | — | 2014-04-01 |
| 8593642 | Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device | Rolf Freimann, Stefan Schulte, Albrecht Hof, Frank Riepenhausen, Matthias Manger +3 more | 2013-11-26 |
| 8508749 | Method of measuring a deviation of an optical surface from a target shape using interferometric measurement results | Ralf Arnold, Stefan Schulte | 2013-08-13 |
| 8269981 | Method and an apparatus for measuring a deviation of an optical test surface from a target shape | Frank Riepenhausen | 2012-09-18 |
| 8264695 | Method of measuring a deviation of an optical surface from a target shape | Ralf Arnold, Stefan Schulte | 2012-09-11 |
| 8243281 | Method and system for measuring a surface of an object | — | 2012-08-14 |
| 8089634 | Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure | Jochen Hetzler, Frank Schillke, Stefan Schulte, Rolf Freimann | 2012-01-03 |
| 7936521 | Method of measuring a deviation of an optical surface from a target shape | Ralf Arnold, Stefan Schulte | 2011-05-03 |
| 7791737 | Method and apparatus for interferometrically measuring the shape of a test object | Matthias Dreher | 2010-09-07 |
| 7738117 | Method of manufacturing an optical element | Michael Altenberger, Thomas Willkens | 2010-06-15 |
| 7605926 | Optical system, method of manufacturing an optical system and method of manufacturing an optical element | Jochen Hetzler, Ralf Arnold, Frank Schillke | 2009-10-20 |
| 7581305 | Method of manufacturing an optical component | Bernhard Geuppert, Jens Kugler, Thomas Ittner, Bernd Geh, Rolf Freimann +3 more | 2009-09-01 |
| 7522292 | System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape | — | 2009-04-21 |
| 7436520 | Method of calibrating an interferometer optics and of processing an optical element having an optical surface | — | 2008-10-14 |
| 7274467 | Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical element | Stefan Schulte | 2007-09-25 |
| 7167251 | Method of processing an optical substrate | Wilhelm Ulrich, Rudolf Tannert | 2007-01-23 |
| 7133225 | Method of manufacturing an optical system | Rolf Freimann, Bernhard Fellner, Hans-Guenther Sachs, Hartmut Brandenburg, Frank Schillke | 2006-11-07 |