Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875985 | Mass spectrometer comprising an ionization device | Leonid Gorkhover, Gennady Fedosenko, Alexander Laue, Rudiger Reuter | 2024-01-16 |
| 10903060 | Method for mass spectrometric examination of gas mixtures and mass spectrometer therefor | Michel Aliman, Gennady Fedosenko, Albrecht Ranck | 2021-01-26 |
| 10304672 | Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture | Gennady Fedosenko, Michel Aliman, Albrecht Ranck, Leonid Gorkhover | 2019-05-28 |
| 10236169 | Ionization device with mass spectrometer therewith | Michel Aliman, Gennady Fedosenko, Ruediger Reuter, Alexander Laue, Achim von Keudell +5 more | 2019-03-19 |
| 10141174 | Method for examining a gas by mass spectrometry and mass spectrometer | Michel Aliman, Alexander Laue, Gennady Fedosenko, Ruediger Reuter, Leonid Gorkhover +3 more | 2018-11-27 |
| 9459538 | Lithography apparatus and method for producing a mirror arrangement | Dirk Schaffer, Wilfried Clauss | 2016-10-04 |
| 9176399 | Component of an EUV or UV lithography apparatus and method for producing it | — | 2015-11-03 |
| 9046794 | Cleaning module, EUV lithography device and method for the cleaning thereof | Stefan Hembacher, Dieter Kraus, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Koehler +2 more | 2015-06-02 |
| 8927090 | Method for bonding bodies and composite body | Dirk Schaffer | 2015-01-06 |
| 8885141 | EUV lithography device and method for processing an optical element | Wolfgang Singer, Yim-Bun Patrick Kwan, Stefan Schmidt, Dirk Heinrich Ehm, Dieter Kraus +3 more | 2014-11-11 |
| 8011319 | Method for oxidizing a layer, and associated holding devices for a substrate | Thomas Gutt | 2011-09-06 |
| 7615499 | Method for oxidizing a layer, and associated holding devices for a substrate | Thomas Gutt | 2009-11-10 |
| 7144747 | Method for thermally treating a substrate that comprises several layers | Georg Roters | 2006-12-05 |