Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10203607 | Optical element unit for exposure processes | Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |
| 9086561 | Optical arrangement in a projection objective of a microlithographic projection exposure apparatus | Hans-Juergen Rostalski, Alexander Epple | 2015-07-21 |
| 9046795 | Optical element unit for exposure processes having sealing element | Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2015-06-02 |
| 8553202 | Projection objective for microlithography | Jens Kugler | 2013-10-08 |
| 8441747 | Optical module with minimized overrun of the optical element | Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner, Bernhard Geuppert +1 more | 2013-05-14 |
| 7869147 | Holding device for optical element | Stefan Hembacher | 2011-01-11 |