Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Jens Kugler +2 more | 2019-02-12 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Jens Kugler +2 more | 2015-06-02 |
| 7545483 | Optical element unit for exposure processes | Bernhard Gellrich, Jens Kugler, Thomas Schletterer, Guido Limbach, Julian Kaller +2 more | 2009-06-09 |