Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372736 | Device for mounting spherical optical components | Jörg Pütz, Wolfgang Singer | 2025-07-29 |
| 11420364 | Optical component and method for the production of same | Joerg Puetz | 2022-08-23 |
| 11029606 | Optical element for the beam guidance of imaging light in projection lithography | Dirk Schaffer, Roman Orlik | 2021-06-08 |
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Marwene Nefzi +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Michael Erath +2 more | 2020-09-01 |
| 10690941 | Lens arrangement, in particular a spectacle glass arrangement and method for producing a lens arrangement | Joerg Puetz, Ralf Meschenmoser | 2020-06-23 |
| 10670777 | Optical component and method for coating optical component | Joerg Puetz | 2020-06-02 |
| 10520838 | Mounting arrangement for an optical imaging arrangement | Dirk Schaffer | 2019-12-31 |
| 10095126 | Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same | Marwene Nefzi, Dirk Schaffer | 2018-10-09 |
| 10007186 | Optical arrangement of a microlithographic projection exposure apparatus | Dirk Schaffer | 2018-06-26 |
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Dirk Schaffer, Andreas Wurmbrand, Bernhard Gellrich, Markus Kern | 2018-06-12 |
| 9804500 | Optical imaging arrangement with simplified manufacture | Jens Kugler, Stefan Xalter | 2017-10-31 |
| 9632421 | Arrangement and lithography apparatus with arrangement | Marwene Nefzi | 2017-04-25 |