Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222655 | Stop, optical system and lithography apparatus | Benjahman Julius Modeste, Toralf Gruner, Daniel Golde, Ulrich Loering, Stefan Xalter | 2025-02-11 |
| 11703770 | Compensation of creep effects in an imaging device | Eylem Bektas Knauf, Ulrich Schoenhoff, Marwene Nefzi, Konrad Carl Steimer, Yim-Bun Patrick Kwan | 2023-07-18 |
| 11526089 | Compensation of creep effects in an imaging device | Marwene Nefzi, Stefan Hembacher, Stefan Troeger, Konrad Carl Steimer | 2022-12-13 |
| 11415895 | Compensation of creep effects in an imaging device | Marwene Nefzi, Toralf Gruner | 2022-08-16 |
| 11048177 | Projection exposure apparatus for semiconductor lithography with improved component adjustment and adjustment method | — | 2021-06-29 |
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Charles Seviour, Michael Erath, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Jens Prochnau, Michael Erath +2 more | 2020-09-01 |
| 10168619 | Optical device for a lithography apparatus, and lithography apparatus | — | 2019-01-01 |