Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System for detecting motion, lithographic apparatus and device manufacturing method

System for detecting motion, lithographic apparatus and device manufacturing method

US Patent 8982359 · Granted Mar 17, 2015

Estimated economic value: $3,746,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Membrane for EUV lithography2025
Vibration isolator for supporting a payload2025
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for 2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Imprint apparatus with movable stages2024
Pellicle and pellicle assembly2024
Thermo-mechanical actuator2024
Actuator unit for positioning an optical element2024
Pellicle and pellicle assembly2024
X-ray imaging arrangement2024
Metrology apparatus2024
Lithographic apparatus2024