Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle

Assignee

• Asml Netherlands B.V.

Inventors

• Mária Péter (28 patents)
• Erik Achilles Abegg (8 patents)
• Adrianus Johannes Maria Giesbers (12 patents)
• Johan Hendrik Klootwijk (49 patents)
• Maxim Aleksandrovich Nasalevich (21 patents)
• Wilhelmus Theodorus Anthonius Johannes Van Den Einden (16 patents)
• Willem Joan Van Der Zande (17 patents)
• Pieter-Jan Van Zwol (30 patents)
• Johannes Petrus Martinus Bernardus Vermeulen (69 patents)
• David Ferdinand Vles (26 patents)
• Willem-Pieter Voorthuijzen (16 patents)

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