Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953105 | Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device | Gerard Van Engelen, Frank Bernhard Sperling, Henricus Wilhelmus Aloysius Janssen, Cornelis D. Van Dijk, Johannes M. M. Van Kimmenade +2 more | 1999-09-14 |