Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Armin Werber +1 more | 2016-12-06 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Armin Schoeppach, Juergen Fischer, Matthias Orth | 2016-05-17 |
| 9298101 | Multi facet mirror of a microlithographic projection exposure apparatus | Markus Hauf | 2016-03-29 |
| 9041910 | Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator | Markus Hauf | 2015-05-26 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Armin Werber +1 more | 2014-11-11 |
| 8854603 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Armin Schoeppach, Juergen Fischer, Matthias Orth | 2014-10-07 |
| 8810934 | Positioning method for an optical arrangement of a projection illumination system | Karl-Eugen Aubele, Erich Merz | 2014-08-19 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7548387 | Optical imaging device | Erich Merz, Martin Mahlmann | 2009-06-16 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |