Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078271 | Optical component | Severin Waldis, Roger Marc Bostock, Jian Deng, Sebastian Lani, Benedikt Knauf +1 more | 2018-09-18 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Armin Schoeppach, Juergen Fischer | 2016-05-17 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Norbert Muehlberger, Thorsten Rassel, Armin Werber +1 more | 2014-11-11 |
| 8854603 | Gravitation compensation for optical elements in projection exposure apparatuses | Norbert Muehlberger, Thorsten Rassel, Armin Schoeppach, Juergen Fischer | 2014-10-07 |