Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935704 | Substrate for an EUV-lithography mirror | Holger Maltor | 2021-03-02 |
| 9604299 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2017-03-28 |
| 8976927 | Substrate for mirrors for EUV lithography | Johannes Lippert, Holger Maltor, Martin Weiser, Heiko Siekmann, Udo Dinger | 2015-03-10 |
| 8705006 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2014-04-22 |
| 7816022 | Composite structure for microlithography and optical arrangement | Hubert Holderer | 2010-10-19 |