Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935704 | Substrate for an EUV-lithography mirror | Claudia Ekstein | 2021-03-02 |
| 8976927 | Substrate for mirrors for EUV lithography | Claudia Ekstein, Johannes Lippert, Martin Weiser, Heiko Siekmann, Udo Dinger | 2015-03-10 |
| 8466047 | Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements | Martin Weiser, Stefan Burkhart | 2013-06-18 |
| 8163632 | Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements | Martin Weiser, Stefan Burkart | 2012-04-24 |