Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2013-08-27 |
| 8358029 | Rotor-shaft integrated generator drive apparatus | — | 2013-01-22 |
| 8163632 | Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements | Martin Weiser, Holger Maltor | 2012-04-24 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2011-02-01 |
| 6739239 | Caston piston | Egon Stratmann | 2004-05-25 |