Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Siegfried Rennon, Johannes Wangler, Andre Bresan +6 more | 2013-08-27 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Siegfried Rennon, Johannes Wangler, Andre Bresan +6 more | 2011-02-01 |