Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921483 | Surface correction of mirrors with decoupling coating | Oliver Dier, Tobias Hackl, Franz-Josef Stickel, Ulrich Loering, Tilmann Assmus +2 more | 2018-03-20 |
| 8693098 | Projection objective for a microlithographic EUV projection exposure apparatus | Hans-Juergen Mann, Thomas Schicketanz | 2014-04-08 |
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Johannes Wangler, Andre Bresan +6 more | 2013-08-27 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Johannes Wangler, Andre Bresan +6 more | 2011-02-01 |