Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346033 | Optical system | Rolf Freimann, Steffen Fritzsche | 2025-07-01 |
| 11803762 | Computer-implemented knowledge management platform and a computer-implemented knowledge management method | Roberto Rocha, Dirk Wenke, Thomas Krekeler, Saverio Maviglia, Daniel Rabus +1 more | 2023-10-31 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2021-06-29 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| 10386733 | Optical system | Rolf Freimann, Steffen Fritzsche | 2019-08-20 |
| 10345547 | Method for producing a lens for a lithography apparatus, and measurement system | Steffen Fritzsche, Rolf Freimann | 2019-07-09 |
| 9213245 | Optical system and multi facet mirror of a microlithographic projection exposure apparatus | Damian Fiolka | 2015-12-15 |