Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Christoph Petri, Florian Baumer, Ulrich Mueller | 2022-11-15 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2021-06-29 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| 10254466 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Markus Deguenther | 2019-04-09 |
| 10209620 | Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus | Christoph Petri | 2019-02-19 |
| 9841685 | Determination of a corrected variable | Christoph Petri, Christian Wald | 2017-12-12 |
| 9671548 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Markus Deguenther | 2017-06-06 |
| 9025131 | Optical beam deflecting element, illumination system including same, and related method | Florian Doll, Reinhard Voelkel, Kenneth Weible, Gundula Weiss, Michael Gerhard | 2015-05-05 |