Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920977 | Metrology system and method for measuring an excitation laser beam in an EUV plasma source | Matthias Manger | 2024-03-05 |
| 11737199 | Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit | Matthias Manger | 2023-08-22 |
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Christoph Petri, Daniel Runde, Ulrich Mueller | 2022-11-15 |
| 11498380 | Arrangement of an angle measurement device | Julian Stratmann, Josef Holtheide, Felix Kallaß, Thorsten Sander | 2022-11-15 |
| 11279191 | Ball joint | Josef Holtheide, Felix Kallass | 2022-03-22 |
| 11192417 | Arrangement for connecting a chassis link to a wheel carrier | Julian Stratmann, Josef Holtheide, Felix Kallass, Thorsten Sander | 2021-12-07 |
| 11048173 | Method for restoring an illumination system for an EUV apparatus, and detector module | — | 2021-06-29 |
| 9823119 | System and method for analyzing a light beam guided by a beam guiding optical unit | Matthias Manger | 2017-11-21 |