Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2021-06-29 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2019-12-24 |