Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Michael Erath, Jens Prochnau +3 more | 2020-10-20 |
| 10254466 | Optical waveguide for guiding illumination light | Christian Wald, Markus Deguenther, Daniel Runde | 2019-04-09 |
| 9671548 | Optical waveguide for guiding illumination light | Christian Wald, Markus Deguenther, Daniel Runde | 2017-06-06 |