Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164102 | Method for generating a mathematical model for positioning individual mirrors of a facet mirror in an optical system | Norman Kretzschmar, Ulrich Mueller | 2024-12-10 |
| 11789367 | Facet mirror for an illumination optical unit of a projection exposure apparatus | Willi Anderl, Christian Körner, Hubert Holderer, Manuel Stompe, Stefan Seitz | 2023-10-17 |
| 11370020 | Levitation melting process | Sergejs Spitans, Henrik FRANZ, Bjoern Sehring | 2022-06-28 |
| 11102850 | Device and method for levitation melting using induction units which are arranged in a tilted manner | Sergejs Spitans, Henrik FRANZ, Bjoern Sehring, Andreas Krieger | 2021-08-24 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2021-06-29 |
| 10843259 | Casting method | Henrik FRANZ, Sergejs Spitans, Ulrich Betz, Egon Bauer | 2020-11-24 |
| 10838307 | Apparatus and method for operating an apparatus | Ulrich Bihr | 2020-11-17 |
| 10678151 | Control device | Jan Horn, Klaus Syrowatka | 2020-06-09 |
| 10514619 | Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system | Ulrich Bihr, Jan Horn | 2019-12-24 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2019-12-24 |
| 10261424 | Lithography apparatus and method for operating a lithography apparatus | Udo Dinger, Ulrich Bihr | 2019-04-16 |
| 10101507 | Mirror device | Yanko Sarov, Fabian Haacker, Mark Christof Wengler, Markus Hauf | 2018-10-16 |
| 10018803 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Jan Horn, Joerg Specht, Johannes Eisenmenger, Stefan Krone | 2018-07-10 |
| 10007195 | Device for determining a tilt angle of at least one mirror of a lithography system, and method | Jan Horn, Joerg Specht | 2018-06-26 |
| 9851555 | Optical component | Benjamin Sigel, Jan Horn, Benedikt Knauf, Fabian Haacker | 2017-12-26 |
| 9721690 | Melting device for consolidating contaminated scrap | Henrik FRANZ, Karl-Heinz Grosse, Michael Protzmann | 2017-08-01 |