Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983443 | Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device | Lars Berger, Ralf Kiesel, Paul Wijlaars | 2021-04-20 |
| 10866528 | Component for a projection exposure apparatus | Thomas Wolfsteiner, Volker Wieczorek, Lars Berger | 2020-12-15 |
| 10444633 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Lars Berger | 2019-10-15 |
| 10437155 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Lars Berger | 2019-10-08 |
| 10018803 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Jan Horn, Markus Holz, Joerg Specht, Johannes Eisenmenger | 2018-07-10 |
| 9851554 | Method for displacing at least one optical component | Lars Berger | 2017-12-26 |
| 9313758 | Method for reduced resource usage in system synchronization, data delivery and asynchronous real-time access mobile communications systems with multiple low complexity terminals | Gerhard Fettweis, Walter Nitzold | 2016-04-12 |
| 9167579 | Method and transmitter/receiver for data transmission with flexible exploitation of time and frequency diversity | Gerhard Fettweis, Nicola Michailow, Michael Lentmaier, Eckhard Ohlmer | 2015-10-20 |
| 7088108 | Method for detecting an offset drift in a wheatstone measuring bridge | Peter Konig, Stefan Woschech, Matthias Böhm, Andreas Schroth | 2006-08-08 |