Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431324 | Multi-beam digital scan and image acquisition | Nicolas Kaufmann, Andreas Adolf, Nico Kaemmer, Christof Riedesel, Stefan Schubert | 2025-09-30 |
| 10866528 | Component for a projection exposure apparatus | Thomas Wolfsteiner, Stefan Krone, Lars Berger | 2020-12-15 |
| 8927948 | Particle beam system and method for operating the same | Josef Biberger, Ralph Pulwey | 2015-01-06 |
| 8723136 | Particle beam system and method for operating the same | Josef Biberger, Ralph Pulwey | 2014-05-13 |