Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276916 | Drive device, optical system and lithography apparatus | Michel Aliman, Matthias Manger, Mohammad Awad | 2025-04-15 |
| 11468042 | Data management unit for supporting health control | Anton Petkov, Arnaud Sestier, Axel Teucher, Artur Keil, Marcus-Meinolf Dittrich +2 more | 2022-10-11 |
| 10983443 | Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device | Stefan Krone, Ralf Kiesel, Paul Wijlaars | 2021-04-20 |
| 10866528 | Component for a projection exposure apparatus | Thomas Wolfsteiner, Stefan Krone, Volker Wieczorek | 2020-12-15 |
| 10663452 | Data management unit for supporting health control | Anton Petkov, Frank Flacke, Jochen Sieber | 2020-05-26 |
| 10444633 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Stefan Krone | 2019-10-15 |
| 10437155 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Stefan Krone | 2019-10-08 |
| 10130256 | Medical device with optical transfer of data and optical reading device for receiving such data | Marcus-Meinolf Dittrich, Anton Petkov | 2018-11-20 |
| 9851554 | Method for displacing at least one optical component | Stefan Krone | 2017-12-26 |
| 9033735 | Contact plug for directly contacting a circuit board | Timo Gaiser, Michael Schoenfeld, Michael Fleig | 2015-05-19 |
| 7241265 | Analyte testing device | Elizabeth Cummings, Mary McEvoy, Ulrich Kraft, Rainer R. Teucher, John C. Davis | 2007-07-10 |
| 7210331 | Detecting element for determining the concentration of a gas component in a measuring gas, and method for manufacturing the detecting element | Helmut Weyl, Bernhard Wild, Rainer Maier, Michael Liebler, Peter Dettling | 2007-05-01 |