Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276916 | Drive device, optical system and lithography apparatus | Michel Aliman, Matthias Manger, Lars Berger | 2025-04-15 |
| 12276917 | Mirror, in particular for microlithography | Jan Horn, Kerstin Hild | 2025-04-15 |
| 11901948 | Modulation device, control device, optical system, lithography system and method | Cornelius Richt | 2024-02-13 |
| 11472044 | Binary passive variable stiffness joint | Dongming Gan, Jorge Dias, Lakmal Seneviratne | 2022-10-18 |
| 10649343 | Method and device for modifying imaging properties of an optical system for microlithography | Jochen Knopf | 2020-05-12 |