| 11789367 |
Facet mirror for an illumination optical unit of a projection exposure apparatus |
Willi Anderl, Christian Körner, Hubert Holderer, Markus Holz, Manuel Stompe |
2023-10-17 |
| 11353560 |
Polygon scanner and method of detecting objects in a monitored zone |
Sascha Steinkogler, Florian Schneider, Helmut Weber, Martin Högy |
2022-06-07 |
| 11240948 |
Portion-wise filling of a reservoir with bulk components |
Thomas Rossmann, Norbert HEILMANN, Johannes JUSTINGER, Stefan MAGG, Stefan Geiger |
2022-02-01 |
| 10767643 |
Method of pump operation, use of the method in HPLC, pump, pump system, and HPLC system |
Christoph Strobl, Michael HAECKEL |
2020-09-08 |
| 10719108 |
Sensor and method of heating a sensor |
— |
2020-07-21 |
| 10612972 |
Light receiver and method for reading out avalanche photodiodes in Geiger mode |
Klaus Clemens, Gottfried Hug |
2020-04-07 |
| 10584998 |
Light receiver having a plurality of avalanche photodiode elements and method for supplying a bias voltage |
Klaus Clemens, Gottfried Hug, Sebastian TSCHUCH |
2020-03-10 |
| 10436638 |
Light receiver having geiger-mode avalanche photodiodes and method for reading out |
Klaus Clemens, Gottfried Hug |
2019-10-08 |
| 10379444 |
Illumination optic for EUV projection lithography |
Matthias Mueller, Thomas Fischer |
2019-08-13 |
| 10018505 |
Geiger mode APD light receiver having an active readout forming a virtual short-circuit |
Klaus Clemens, Gottfried Hug, Sebastian TSCHUCH |
2018-07-10 |
| 9889836 |
Electromechanical braking device for a braking system and braking system for a vehicle |
Dirk Mahnkopf, Andreas Schlichenmaier, Otmar Bussmann, Bertram Foitzik, Thomas Eichhorn |
2018-02-13 |
| 8865499 |
MEMS microphone and method for producing the MEMS microphone |
Wolfgang Pahl, Hans Krueger, Gregor Feiertag, Alois Stelzl, Anton Leidl |
2014-10-21 |
| 8432007 |
MEMS package and method for the production thereof |
Anton Leidl, Hans Krueger, Alois Stelzl, Wolfgang Pahl |
2013-04-30 |
| 8169041 |
MEMS package and method for the production thereof |
Wolfgang Pahl, Anton Leidl, Hans Krueger, Alois Stelzl |
2012-05-01 |
| 8009407 |
Adjustable capacitor and circuit provided therewith |
Anton Leidl, Wolfgang Sauer |
2011-08-30 |
| 7771053 |
Method and apparatus for online contact lens evaluation |
Hans-Joachim Polland, Kristian Hohla, Gerhard Youssefi, Ernst Hegels, Birte Jansen +1 more |
2010-08-10 |
| 7708411 |
Online wavefront measurement and display |
Hans-Joachim Polland, Gerhard Youssefi |
2010-05-04 |
| 6976665 |
Electromagnetically actuatable valve |
Andreas Schrade, Guenther Schnalzger, Hubert Hueber, Martin Kirschner, Ralph Appelt |
2005-12-20 |
| 6518084 |
Method of producing a micromechanical structure for a micro-electromechanical element |
Leonhard Hoefter, Juergen Kruckow, Karl Neumeier, Dieter Bollmann |
2003-02-11 |
| 5562430 |
Reciprocating piston pump with a housing block and at least one reciprocating piston pump element |
Wolfgang Schuller, Horst Stade |
1996-10-08 |
| 5540570 |
Reciprocating piston pump with a housing block and at least one reciprocating piston pump element |
Wolfgang Schuller, Horst Stade |
1996-07-30 |
