Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978626 | Carrier wafer, method for holding a flexible substrate and method for the manufacture of a carrier wafer | Christoph Kutter, Christof Landesberger | 2018-05-22 |
| 7667945 | Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement | Robert Wieland | 2010-02-23 |
| 7273763 | Method of producing a micro-electromechanical element | Karl Neumeier | 2007-09-25 |
| 6518084 | Method of producing a micromechanical structure for a micro-electromechanical element | Stefan Seitz, Leonhard Hoefter, Juergen Kruckow, Karl Neumeier | 2003-02-11 |
| 6451668 | Method of producing calibration structures in semiconductor substrates | Karl Neumeier | 2002-09-17 |
| 5279703 | Process for the thin etching of substrates | Karl Haberger, Reinhold Buchner | 1994-01-18 |
| 5016487 | Ball bearig gears | — | 1991-05-21 |