Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467115 | Fluid sensor | Ignaz Eisele, Martin HEIGL, Daniel Reiser | 2022-10-11 |
| 11167981 | Semiconductor device and method of producing a semiconductor device | Sabine Trupp, Michael Henfling | 2021-11-09 |
| 10519034 | Semiconductor device and method of producing a semiconductor device | Sabine Trupp, Michael Henfling | 2019-12-31 |
| 7273763 | Method of producing a micro-electromechanical element | Dieter Bollmann | 2007-09-25 |
| 6518084 | Method of producing a micromechanical structure for a micro-electromechanical element | Stefan Seitz, Leonhard Hoefter, Juergen Kruckow, Dieter Bollmann | 2003-02-11 |
| 6451668 | Method of producing calibration structures in semiconductor substrates | Dieter Bollmann | 2002-09-17 |
| 4326937 | Grab mechanism | Robert J. Sullivan | 1982-04-27 |