| 10015600 |
Multi-MEMS module |
Wolfgang Pahl |
2018-07-03 |
| 9061888 |
Sensor module and method for producing sensor modules |
Wolfgang Pahl, Anton Leidl |
2015-06-23 |
| 9056760 |
Miniaturized electrical component comprising an MEMS and an ASIC and production method |
Hans Krueger, Wolfgang Pahl, Anton Leidl |
2015-06-16 |
| 9051174 |
Method for encapsulating an MEMS component |
Wolfgang Pahl |
2015-06-09 |
| 8865499 |
MEMS microphone and method for producing the MEMS microphone |
Wolfgang Pahl, Hans Krueger, Alois Stelzl, Anton Leidl, Stefan Seitz |
2014-10-21 |
| 8674464 |
MEMS component, method for producing a MEMS component, and method for handling a MEMS component |
Wolfgang Pahl, Anton Leidl |
2014-03-18 |
| 8674498 |
MEMS package and method for the production thereof |
Hans Kruger, Alexander Schmajew |
2014-03-18 |
| 8580613 |
Semiconductor chip arrangement with sensor chip and manufacturing method |
Hans Krueger, Anton Leidl, Alois Stelzl |
2013-11-12 |
| 8571239 |
MEMS microphone |
Anton Leidl, Wolfgang Pahl, Matthias Winter, Christian Siegel |
2013-10-29 |
| 8553920 |
Arrangement comprising a microphone |
Anton Leidl |
2013-10-08 |
| 8404516 |
Method for producing a MEMS package |
Christian Bauer, Hans Krueger, Alois Stelzl |
2013-03-26 |
| 8294535 |
Electrical component and production method |
Hans Kruger, Wolfgang Pahl, Alois Stelzl |
2012-10-23 |
| 7552532 |
Method for hermetically encapsulating a component |
Alois Stelzl, Hans Krueger, Ernst Christl |
2009-06-30 |
| 7518201 |
Method for encapsulating an electrical component, and surface acoustic wave device encapsulated using said method |
Alois Stelzl, Hans Kruger |
2009-04-14 |
| 7388281 |
Encapsulated electronic component and production method |
Hans Krueger, Jürgen Portmann, Karl Nicolaus, Alois Stelzl |
2008-06-17 |
| 7094626 |
Method for encapsulating an electrical component |
Alois Stelzl, Hans Kruger |
2006-08-22 |
| 6909183 |
Substrate for an electric component and method for the production thereof |
Alois Stelzl, Hans Kruger |
2005-06-21 |
