Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12116269 | Microelectromechanical microphone having a robust backplate | Pirmin Hermann Otto Rombach | 2024-10-15 |
| 11142453 | MEMS device stress-reducing structure | Klaus Mayer, Christian Siegel, Wolfgang Pahl, Stefan Stufler | 2021-10-12 |
| 10683201 | Resiliently mounted sensor system with damping | Pirmin Hermann Otto Rombach, Kurt Rasmussen, Wolfgang Pahl, Dennis Mortensen | 2020-06-16 |
| 10622957 | Integrated circuit, circuit assembly and a method for its operation | Pirmin Hermann Otto Rombach, Gino Rocca, Armin Schober | 2020-04-14 |
| 10581397 | Integrated circuit, circuit assembly and a method for its operation | Pirmin Hermann Otto Rombach, Gino Rocca, Armin Schober | 2020-03-03 |
| 10142729 | Microphone and method of operating a microphone | Jan Tue Ravnkilde, Christian Siegel, Matthias Jungkunz, Gino Rocca, Ivan Riis Nielsen +1 more | 2018-11-27 |
| 10136226 | Top-port MEMS microphone and method of manufacturing the same | Jan Tue Ravnkilde, Marcel Giesen, Kurt Rasmussen, Morten Ginnerup, Pirmin Hermann Otto Rombach +3 more | 2018-11-20 |
| 9278854 | Method for producing a sensor | Wolfgang Pahl, Jürgen Portmann, Robert Eichinger, Christian Siegel, Karl Nicolaus +2 more | 2016-03-08 |
| 9061888 | Sensor module and method for producing sensor modules | Wolfgang Pahl, Gregor Feiertag | 2015-06-23 |
| 9056760 | Miniaturized electrical component comprising an MEMS and an ASIC and production method | Gregor Feiertag, Hans Krueger, Wolfgang Pahl | 2015-06-16 |
| 8865499 | MEMS microphone and method for producing the MEMS microphone | Wolfgang Pahl, Hans Krueger, Gregor Feiertag, Alois Stelzl, Stefan Seitz | 2014-10-21 |
| 8713789 | Method of manufacturing a microphone | Wolfgang Pahl | 2014-05-06 |
| 8674464 | MEMS component, method for producing a MEMS component, and method for handling a MEMS component | Wolfgang Pahl, Gregor Feiertag | 2014-03-18 |
| 8624466 | Component having stress-reduced mounting | Ansgar Schäufele, Wolfgang Sauer | 2014-01-07 |
| 8611566 | MEMS-microphone | Wolfgang Pahl, Matthias Jungkunz, Andreas Beer | 2013-12-17 |
| 8580613 | Semiconductor chip arrangement with sensor chip and manufacturing method | Gregor Feiertag, Hans Krueger, Alois Stelzl | 2013-11-12 |
| 8582788 | MEMS microphone | Wolfgang Pahl, Ulrich Wolff | 2013-11-12 |
| 8571239 | MEMS microphone | Gregor Feiertag, Wolfgang Pahl, Matthias Winter, Christian Siegel | 2013-10-29 |
| 8553920 | Arrangement comprising a microphone | Gregor Feiertag | 2013-10-08 |
| 8432007 | MEMS package and method for the production thereof | Hans Krueger, Alois Stelzl, Wolfgang Pahl, Stefan Seitz | 2013-04-30 |
| 8393214 | Rotating motion sensor | Werner Ruile | 2013-03-12 |
| 8184845 | Electrical module comprising a MEMS microphone | Wolfgang Pahl, Ulrich Wolff | 2012-05-22 |
| 8169041 | MEMS package and method for the production thereof | Wolfgang Pahl, Stefan Seitz, Hans Krueger, Alois Stelzl | 2012-05-01 |
| 8009407 | Adjustable capacitor and circuit provided therewith | Wolfgang Sauer, Stefan Seitz | 2011-08-30 |
| 7998805 | Component with sensitive component structures and method for the production thereof | Thomas Baier, Waldemar Gawlik, Günter Kovacs, Christian Math, Werner Ruile | 2011-08-16 |