Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7457059 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2008-11-25 |
| 7400460 | Method for connection of an optical element to a mount structure | Bernhard Gellrich, Dirk Rexhaeuser | 2008-07-15 |
| 7354168 | Facet mirror having a number of mirror facets | Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert, Frank Melzer +4 more | 2008-04-08 |
| 7336342 | Projection method including pupillary filtering and a projection lens therefor | Christian Hembd-Soellner, Rudolf Von Buenau, Ulrich Haag | 2008-02-26 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |
| 7251086 | Apparatus for positioning an optical element in a structure | Ulrich Weber, Dirk Rexhaeuser | 2007-07-31 |
| 7242537 | Holding and positioning apparatus for an optical element | Ulrich Weber | 2007-07-10 |
| 7193794 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2007-03-20 |
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Winfried Kaiser, Alexander Kohl, Jens Kugler +2 more | 2007-01-30 |
| 7123427 | Objective, particularly a projection objective for use in semiconductor lithography | Alexander Kohl, Werner Lang, Hartmut Brandenburg | 2006-10-17 |
| 7090362 | Facet mirror having a number of mirror facets | Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert, Frank Melzer +1 more | 2006-08-15 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Alexander Kohl, Armin Schoeppach, Erwin Gaber, Winfried Kaiser +5 more | 2006-07-18 |
| 7014328 | Apparatus for tilting a carrier for optical elements | Ulrich Weber, Alexander Kohl | 2006-03-21 |
| 6967792 | Apparatus for positioning an optical element in a structure | Ulrich Weber, Dirk Rexhaeuser | 2005-11-22 |
| 6943965 | Method for correcting oscillation-induced imaging errors in an objective | Alexander Kohl | 2005-09-13 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Winfried Kaiser, Alexander Kohl, Jens Kugler +2 more | 2005-04-12 |
| 6842294 | Catadioptric objective | Ulrich Weber, Alexander Kohl, Toralf Gruner, Christoph Zaczek, Jens Ullmann +3 more | 2005-01-11 |
| 6784977 | Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography | Rudolf Von Bünau, Christian Hembd-Söllner | 2004-08-31 |
| 6781668 | Optical arrangement | Karl-Heinz Schuster, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2004-08-24 |
| 6744574 | Mount for an optical element in an optical imaging device | Ulrich Weber, Jochen Becker, Bernhard Gellrich, Jens Kugler | 2004-06-01 |
| 6728021 | Optical component and method of inducing a desired alteration of an optical property therein | Alexander Kohl | 2004-04-27 |
| 6583850 | Optical system | Wolfgang Hummel, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter | 2003-06-24 |
| 6521877 | Optical arrangement having improved temperature distribution within an optical element | Werner Müller-Rissmann, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6522392 | Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system | Werner Müller-Rissmann, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6504597 | Optical arrangement | Karl-Heinz Schuster, Rudolf Von Bünau, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-01-07 |