BL

Björn Liebaug

CG Carl Zeiss Smt Gmbh: 2 patents #466 of 1,189Top 40%
📍 Ulm, DE: #388 of 1,004 inventorsTop 40%
Overall (All Time): #1,856,291 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11448968 Beam-forming and illuminating system for a lithography system, lithography system, and method Hubert Holderer, Klaus Abele 2022-09-20
10831114 Lithography apparatus and method Franz-Josef Stickel, Jurgen Hofmann, Dietmar Dürr 2020-11-10