Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448968 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Hubert Holderer, Klaus Abele | 2022-09-20 |
| 10831114 | Lithography apparatus and method | Franz-Josef Stickel, Jurgen Hofmann, Dietmar Dürr | 2020-11-10 |