Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2018-02-13 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2017-01-31 |
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2015-08-11 |
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Rafael Egger +2 more | 2014-10-28 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2012-10-30 |
| 7697211 | Symmetrical objective having four lens groups for microlithography | David Shafer, Aurelian Dodoc, Johannes Zellner, Heiko Feldmann, Wilhelm Ulrich +3 more | 2010-04-13 |
| RE40743 | Projection exposure system having a reflective reticle | Christian Wagner, Uwe Goedecke, Henriette Mueller | 2009-06-16 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Deguenther, Markus Brotsack, Wolfgang Singer, Manfred Maul +2 more | 2009-03-31 |
| 7405808 | Optical system, in particular illumination system, of a microlithographic projection exposure apparatus | Toralf Gruner, Michael Totzeck, Damian Fiolka, Wilhelm Ulrich | 2008-07-29 |
| 7271876 | Projection objective for microlithography | Wilhelm Ulrich, Michael Gerhard | 2007-09-18 |
| 4613217 | Spectacle lens having astigmatic power | Hans Lahres | 1986-09-23 |