Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Gerhard Fuerter, Rafael Egger +2 more | 2014-10-28 |
| 7372634 | Reticle-masking objective with aspherical lenses | Johannes Wangler, Karl-Heinz Schuster, Alexander Epple, Jorg Schultz, Jurgen Grunwald | 2008-05-13 |
| 7130129 | Reticle-masking objective with aspherical lenses | Jurgen Grunwald, Johannes Wangler, Karl-Heinz Schuster, Alexander Epple, Jorg Schultz | 2006-10-31 |
| 6683728 | Illumination system with reduced energy loading | Jess Köhler | 2004-01-27 |
| 6680803 | Partial objective in an illuminating systems | Jorg Schultz, Alexander Epple, Johannes Wangler, Christa Muller | 2004-01-20 |