Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335268 | Device and method for determining the concentration of fluorophores in a sample | Jörg Zeiner | 2016-05-10 |
| 9006685 | Device and method for determining the concentration of fluorophores in a sample | Jörg Zeiner | 2015-04-14 |
| 8873151 | Illumination system for a microlithgraphic exposure apparatus | Alexander Sohmer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Gerhard Fuerter +2 more | 2014-10-28 |
| 8334522 | Method for the quantitative determination of the concentration of fluorophores of a substance in a sample and apparatus for carrying out the same | — | 2012-12-18 |
| 8134687 | Illumination system of a microlithographic exposure apparatus | Wolfgang Singer, Johannes Wangler, Wilhelm Ulrich | 2012-03-13 |
| 8045172 | Method and apparatus for determining the concentration of a substance in a liquid | — | 2011-10-25 |
| 7864429 | Optical illumination system for creating a line beam | Holger Muenz, Alois Herkommer | 2011-01-04 |
| 7542217 | Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus | Wolfgang Singer, Markus Deguenther, Birgit Kuerz, Johannes Wangler, Manfred Maul | 2009-06-02 |
| 7538948 | Optical illumination system for creating a line beam | Holger Muenz, Alois Herkommer | 2009-05-26 |