Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7605386 | Optical device with raster elements, and illumination system with the optical device | Wolfgang Singer, Johannes Wangler, Markus Deguenther, Christoph Menke | 2009-10-20 |
| 7542217 | Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus | Wolfgang Singer, Markus Deguenther, Rafael Egger, Johannes Wangler, Manfred Maul | 2009-06-02 |
| 7239447 | Objective with crystal lenses | Aksel Goehnermeier, Alexandra Pazidis, Christoph Zaczek, Daniel Kraehmer | 2007-07-03 |