Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6707537 | Projection exposure system | Nils Dieckmann, Johannes Wangler | 2004-03-16 |
| 6683728 | Illumination system with reduced energy loading | Alexander Sohmer | 2004-01-27 |
| 6597511 | Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system | Johannes Wangler | 2003-07-22 |
| 6583937 | Illuminating system of a microlithographic projection exposure arrangement | Johannes Wangler | 2003-06-24 |