Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191382 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2019-01-29 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2018-05-22 |
| 9599904 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2017-03-21 |
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2016-04-12 |
| 8467031 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2013-06-18 |
| 7405809 | Illumination system particularly for microlithography | Joachim Hainz, Wolfgang Singer | 2008-07-29 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2008-01-22 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2006-08-15 |