Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7911584 | Illumination system for microlithography | Wolfgang Singer, Joachim Wietzorrek, Gabriele Weirauch, Manfred Maul | 2011-03-22 |
| 7460212 | Collector configured of mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Jochen Wietzorrek, Frank Melzer +1 more | 2008-12-02 |
| 7443948 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger, Wolfgang Singer +2 more | 2008-10-28 |
| 7405809 | Illumination system particularly for microlithography | Wolfgang Singer, Erich Schubert | 2008-07-29 |
| 7362414 | Optical system having an optical element that can be brought into at least two positions | Wolfgang Singer, Joachim Wietzorrek, Markus Weiss | 2008-04-22 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Wietzorrek, Johannes Wangler +5 more | 2008-01-22 |
| 7244954 | Collector having unused region for illumination systems using a wavelength ≦193 nm | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Jochen Wietzorrek, Frank Melzer +1 more | 2007-07-17 |
| 7126137 | Illumination system with field mirrors for producing uniform scanning energy | Wolfgang Singer, Hans-Joachim Frasch, Johannes Wangler, Joachim Wietzorrek, Jorg Schultz | 2006-10-24 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Wietzorrek, Johannes Wangler +5 more | 2006-08-15 |
| 7015489 | Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Jochen Wietzorrek, Frank Melzer +1 more | 2006-03-21 |
| 7006595 | Illumination system particularly for microlithography | Wolfgang Singer, Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2006-02-28 |