Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209411 | Multilayer mirror | Aksel Goehnermeier | 2019-02-19 |
| 10061205 | Reflective optical element | Dirk Heinrich Ehm, Moritz Becker, Irene Ament, Joern WEBER | 2018-08-28 |
| 9996005 | Reflective optical element and optical system for EUV lithography | Dirk Heinrich Ehm, Peter Huber, Stephan Muellender | 2018-06-12 |
| 9880476 | Method for producing a capping layer composed of silicon oxide on an EUV mirror, EUV mirror, and EUV lithography apparatus | Dirk Heinrich Ehm | 2018-01-30 |
| 9696632 | Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror | Peter Huber | 2017-07-04 |
| 9494718 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Stephan Muellender, Joern WEBER, Wilfried Clauss, Hans-Jochen Paul, Gerhard Braun +4 more | 2016-11-15 |
| 9229331 | EUV mirror comprising an oxynitride capping layer having a stable composition, EUV lithography apparatus, and operating method | Dirk Heinrich Ehm | 2016-01-05 |
| 8430514 | Reflective optical element and method for production of such an optical element | — | 2013-04-30 |
| 8246182 | Reflective optical element and method for production of such an optical element | — | 2012-08-21 |