Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Sandro Hoffmann, Joern WEBER, Mirko Ribow, Christoph Nottbohm +2 more | 2025-09-02 |
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter +3 more | 2022-05-10 |
| 10423073 | Method for producing a mirror element | Hartmut Enkisch, Peter Huber | 2019-09-24 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Oliver Dier, Ralf Winter | 2019-02-12 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Joern WEBER +2 more | 2018-03-13 |