Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Joern WEBER, Sebastian Strobel, Mirko Ribow, Christoph Nottbohm +2 more | 2025-09-02 |
| 12386263 | Reflective optical element, illumination optical unit, projection exposure apparatus, and method for producing a protective layer | Valentin Jonatan Bolsinger, Sandra Haschke | 2025-08-12 |