Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386263 | Reflective optical element, illumination optical unit, projection exposure apparatus, and method for producing a protective layer | Sandro Hoffmann, Sandra Haschke | 2025-08-12 |
| 12326663 | Optical component | — | 2025-06-10 |
| 11194256 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, William Peter Van Drent, Jozef Petrus Henricus Benschop | 2021-12-07 |
| 10852640 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, William Peter Van Drent, Jozef Petrus Henricus Benschop | 2020-12-01 |