Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Sandro Hoffmann, Joern WEBER, Sebastian Strobel, Christoph Nottbohm +2 more | 2025-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Sandro Hoffmann, Joern WEBER, Sebastian Strobel, Christoph Nottbohm +2 more | 2025-09-02 |