Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139733 | Diaphragm changing device | Hermann Bieg, Marcus Will, Thomas C. Bischoff, Yim-Bun Patrick Kwan, Uy-Liem Nguyen +1 more | 2018-11-27 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8179621 | Apparatus for manipulation of an optical element | Johannes Lippert | 2012-05-15 |
| 8089707 | Diaphragm changing device | Hermann Bieg, Marcus Will, Thomas C. Bischoff, Yim-Bun Patrick Kwan, Uy-Liem Nguyen +1 more | 2012-01-03 |
| 7995884 | Device consisting of at least one optical element | Yim-Bun Patrick Kwan, Johannes Lippert | 2011-08-09 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7684125 | Diaphragm changing device | Hermann Bieg, Thomas C. Bischoff, Uy-Liem Nguyen, Stefan Xalter, Marcus Will +1 more | 2010-03-23 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |
| 6897599 | System for damping oscillations | Franz Sorg, Stefan Xalter, Frank Melzer, Bernhard Gellrich | 2005-05-24 |
| 6864988 | Optical system with isolated measuring structure | Albrecht Hof, Guenter Maul, Klaus Mehlkopp | 2005-03-08 |
| 6700715 | Oscillation damping system | Franz Sorg, Stefan Xalter, Bernhard Gellrich, Frank Melzer, Thomas Ittner | 2004-03-02 |
| 6445510 | Optical imaging device, in particular lens system, with at least one system diaphragm | Karlheinz Schuster, Thomas C. Bischoff, Bernhard Gellrich, Guenter Maul | 2002-09-03 |