Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2011-07-12 |
| RE42065 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2011-01-25 |
| 7871171 | Focusing-device for the radiation from a light source | Frank Melzer, Andreas Seifert, Wolfgang Singer | 2011-01-18 |
| RE41667 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2010-09-14 |
| 7592598 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2009-09-22 |
| 7583433 | Multi mirror system for an illumination system | Isabel Escudero-Sanz, Wolfgang Singer, Johannes Wangler, Jorg Schultz | 2009-09-01 |
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs +5 more | 2009-01-06 |
| 7456408 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2008-11-25 |
| 7443948 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger, Wolfgang Singer +2 more | 2008-10-28 |
| 7410265 | Focusing-device for the radiation from a light source | Frank Melzer, Andreas Seifert, Wolfgang Singer, Wilhelm Egle, Bernhard Gellrich +1 more | 2008-08-12 |
| 7400699 | Illumination system with raster elements of different sizes | Wolfgang Singer, Wilhelm Ulrich | 2008-07-15 |
| 7348565 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2008-03-25 |
| 7329886 | EUV illumination system having a plurality of light sources for illuminating an optical element | Wolfgang Singer, Nils Dieckmann, Dirk Rothweiler, Jorg Schultz | 2008-02-12 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2008-01-22 |
| 7186983 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2007-03-06 |
| 7142285 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2006-11-28 |
| 7109497 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2006-09-19 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2006-08-15 |
| 7006595 | Illumination system particularly for microlithography | Wolfgang Singer, Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Udo Dinger +2 more | 2006-02-28 |
| 6947124 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-09-20 |
| 6947120 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-09-20 |
| 6927403 | Illumination system that suppresses debris from a light source | Wolfgang Singer, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine, Erik Roelof Loopstra | 2005-08-09 |
| 6858853 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-02-22 |
| 6859328 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Hein Schuster, Udo Dinger, Wolfgang Singer +2 more | 2005-02-22 |
| 6840640 | Multi mirror system for an illumination system | Isabel Escudero-Sanz, Wolfgang Singer, Johannes Wangler, Jorg Schultz | 2005-01-11 |